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Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set?
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25th Oct 2019
These are super routine terms in semiconductor fabs. You should learn the process steps to manufacturing semiconductors so these terms are clear. Start with that now; one needs to be "buzzword compliant" in a general sense.
https://en.wikipedia.org/wiki/Semiconductor_device_fabrication
There are textbooks covering this in more detail. Gory yet still somewhat summary details can be found in Fundamentals of Microfabrication and Nanotechnology - Volume 1. Beyond that it's specialized textbooks, IEEE papers and talking with IEEE paper authors directly.
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