A good Book that goes into detail about the different methods is Introduction to Microelectronic Fabrication (it’s pretty dry thought).
Also This similar textbook was used in a similar class (even more dry but I have the pdf if you want to look through it for free)
For reference, the first was used for an electrical engineering course and is much more specific on ICs from what I remember. The second was used in a Material science course and is more general I think I actually didn’t go through it as much.